Nanotechnology Conference and Trade Show - Nanotech 2006
> Program > Technical Conferences > Business & Development > Nano Impact Workshop > Nanotech Job Fair > Expo
Program
Sessions
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Index of Keywords
Confirmed Speakers
Conferences & Symposia

Conference Proceedings

Conference Technical Proceedings

Quantiscript

C. Brisson
C-Round, CA

Keywords:
Electronics

Abstract:
QUANTISCRIPT Inc., a spin-off of the University of Sherbrooke, has developed and patented two non-spin coated, substrate-conformable e-beam resists and process technology to enable advanced nano and micro patterning applications, including the production of photomasks used in the manufacturing process of integrated circuits: QSR-5 and QPR-P50.
The company’s flagship product is QPR-P50, a positive e-beam resist targeted at the fabrication of photomasks and nanoimprint templates for the upcoming 45nm and 32nm technology nodes. QPR-P50 is deposited using a novel plasma-based deposition technique versus the current spin-coating deposition widely used today. QPR-P50 can thus be deposited in highly uniform and ultra-thin layers required to achieve sub-50nm resolution and critical resist performance requirements including Cost of Ownership (CoO) objectives. The development is at a maturity level suitable for the establishment of market driven strategic partnerships and licensing to major players in the semiconductor industry.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2006 Conference Program Abstract

 
Nanotechnology Conference | Terms of use | Privacy policy | Contact | NSTI Home
Program | Technical Conferences | Business & Development | Nano Impact Workshop | Nanotech Job Fair | Expo |
Nanotech 2006 Home | Press Room | Venue | Subscribe | Site Map
Names, and logos of other organizations are the property of those organizations and not of NSTI.
This event is not open to the general public and NSTI reserves the right to refuse admission and participation to any individual.