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Compact Modeling of Spiral Inductors for RF Applications

J. Chen and J.J. Liou
University of Central Florida, US

Keywords:
inductors, q factors, rf

Abstract:
Recent growth in RF applications has increased the use of spiral inductors and thus demanded a more accurate model for such devices. In this paper, we develop a compact model for spiral inductors with symmetrical and asymmetrical terminals. Relevant and important physics such as the current crowding in metal line, coupling capacitance, frequency-dependent permittivity in oxide, and overlap parasitics are accounted for. Experimental data and results calculated from the existing inductor models are included in support of the model development.

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