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Nanoporous Silicon Sensor for Biological Applications

G. Kirakosyan
Engineering Academy of Armenia, AM

Keywords:
Sensor, silicon, biomaterials, dipole

Abstract:
The optical and electrical parameters of nanoporous silicon fabricated with heavily doped p-type silicon are very sensitive to the gases and organic solvents. For sensing the gases and biomaterials the two types of sensors were developed. The strong correlation between structural properties (pore morphology and nanoporous silicon layer thickness) and the sensitivity of sensors was obtained. The response of bio-molecules with different dipole moments was considered. It was shown, that conductance and capacitance is increasing, when the molecular dipole moment is increased.

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