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Advances in Nanoscale Probing: Semiconductor, Bio, and Beyond

T. Cavanah
Zyvex, US

Keywords:
SEM, nanoscale characterization, nanomanipulation

Abstract:
As nanoscale science moves closer to application there is an increasingly large need for equipment that can span the gap between macro and nano.  Nanomanipulation inside of an SEM is the fastest and most reliable method used today.  Nano-sharp tungsten probes are placed with five nanometer resolution to manipulate and characterize nanostructures.  The semiconductor industry has moved into 45nm development and can no longer characterize their devices using traditional macro and micro methods.  Bio researchers are requiring more precision as they characterize and manipulate organelles within the cell.  Labs and companies are beginning to build nanodevices using a single nanotube, nanowire, or other nanostructures.  Current challenges in the field include lower noise limits, heating and cooling of the sample, ohmic contact, force measurement, and high frequency characterization.  Application development in nanomanipulation is key to the development of nanoscale science and technology.

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