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A New High Precision Procedure for AFM Probe Spring Constant Measurement using a Microfabricated Calibrated Reference Cantilever Array (CRCA)

M.G. Reitsma and R.S. Gates
National Institute of Standards and Technology, US

Keywords:
atomic force microscope, cantilever, stiffness calibration

Abstract:
A new technique for calibrating Atomic Force Microscope (AFM) cantilevers is demonstrated using a unique array of microfabricated reference cantilevers. The array, consisting of seven uniform rectangular cantilevers of different length (and thus stiffness), was used to perform a high precision calibration on a commercial AFM cantilever. When combined with independent validation of the reference array with an SI traceable method, the technique presented here will offer an approach for high accuracy AFM cantilever calibration.

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