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Chemical Filtration Strategies for the Control of Airborne Molecular Contamination

B. Stanley
Purafil, US

Keywords:
chemical filtration, airborne molecular contamination

Abstract:
Airborne molecular contamination (AMC) continues to be a major contamination issue for microelectronics manufacturers. Because of this, facility, process, and contamination control engineers are being offering a large number of AMC control options from which it must determined which is the best solution for specific AMC control application(s). This presentation will provide information on the various types of chemical filters available, strengths and weaknesses, and the results of independent performance evaluations for a number of different chemical filter types. Several AMC control strategies employing chemical filtration will be discussed.

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