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Validation for Micro- and Nano-Sensors

M. Henry
Oxford University, UK

Keywords:
sensors, MEMS

Abstract:
The rapid development of sensor and processing technologies is offering many opportunities for embedding new functionality within sensing devices. One important area is the development of diagnostics. While the generation of diagnostic error codes is becoming common, these can be difficult to integrate into a wider control system, and do not address the more fundamental issue of the quality of the underlying measurement. The SEVA (sensor validation) approach, which is now embedded in a Brtish Standard (BS-7986) proposes that each sensor assesses the quality of each measurement value is generates, including the influence of any diagnosed faults, in order to generate an on-line uncertainy value. This talk will give examples of sensors and techniques for validation, including its application to a micro-machined flow meter.

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