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Gas Sensor Arrays by Supersonic Cluster Beam Deposition

E. Barborini, M. Leccardi, G. Bertolini, O. Rorato, M. Franchi, D. Bandiera, M. Gatelli, K. Wegner, A. Raso, A. Garibbo, C. Ducati, P. Piseri and P. Milani
Tethis S.r.l., IT

Keywords:
gas sensors, clusters, nanostructured films, deposition

Abstract:
Supersonic cluster beam deposition was employed to produce nanostructured thin films of transition metal oxides to be used as gas sensors. The cluster beam was generated by a pulsed microplasma cluster source equipped with aerodynamic lenses in order to achieve beam stability, high collimation, high in-axis intensity, and high deposition rates. Hard mask patterning was exploited on micro-machined substrates having an array structure and materials with different properties were deposited on each single element of the array. The materials constituting the active elements of the array were chosen based on their response to various gases. Results on the deposition of nanostructured TiO2, WO3, SnO2, ZnO, and on the detection of volatile organic compounds (VOC) and gases related to environmental pollution (such as NOx) are reported.

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