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Simulations of the Anchor Losses in MEM Disk Resonators

D. Paci, S. Stoffels and H.A.C. Tilmans
IMEC, BE

Keywords:
anchor losses, quality factor, disk resonators

Abstract:
MEM (Micro Electro Mechanical) resonators have been proposed as fundamental components in RF transmission systems; especially bulk mode resonators are very attractive devices because of their small size and their high resonance frequencies combined with high quality factors. The quality factor is a fundamental parameter to evaluate the performance of a MEM resonator. Consequently it is very important to understand the physical mechanisms, which limit the quality factor. We concentrate on one loss mechanism in bulk mode disk resonators, namely anchor losses and use finite element methods to get an estimation for these losses. The substrate is modeled as a highly energy absorbing layer. Some geometrical parameters of the disk are analyzed, such as the dimensions of the anchor.

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