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Real-Time Drift Correction of a Focused Ion Beam Milling System

D. Freeman, B. Luther-Davies and S. Madden
Australian National University, AU

Keywords:
focused ion beam, photonic crystals, nanofabrication, drift correction

Abstract:
We are working towards the fabrication of large periodic optical structures known as photonic crystals. A focused ion beam (FIB) is used to mill holes, which must be smooth and repeatable, with nm positional accuracy. We are developing custom pattern generation software for this purpose.
FIB systems suffer from slow systematic drift over long milling times, and we have developed a real-time drift correction scheme which mills a series of reference marks and then periodically FIB images them to detect and compensate for the apparent motion of the specimen under the beam.

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