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Nanoporous Silicon Membrane Based Micro Fuel Cells for Portable Power Sources Applications

K-L Chu, M.A. Shannon and R.I. Masel
University of Illinois at Urbana-Champaign, US

Keywords:
nanoporous silicon, fuel cell, formic acid

Abstract:
In this paper the formation of nanoporous silicon membranes and evaluation of their usage for the solid electrolyte in miniature direct formic acid fuel cells compatible with silicon micro-fabrication technology is reported. Nanoporous silicon membranes with different thickness and different pore sizes were fabricated, and micro fuel cells with these membranes were fabricated and tested for their performances.

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