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Method for formining nanoscale features

A. Hunt
University of Michigan, US

Keywords:
laser nanomachining microfluidics nanofluidics diagnostics microTAS

Abstract:
A versitile technique for machining nanometer-scale features using tightly-focused ultarshort laser pulses. By the invention, the size of features can be reduced far below the wavelength of light, thus enabling nanomachining of a wide range of materials.

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