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Challenges of Sampling Airborne Particles within Small Enclosed Spaces

J. Gecsey
Hach Ultra Analytics, US

Keywords:
contamination, airborne particles, minienvironment, isolators, vacuum

Abstract:
Sampling airborne particles in a restricted space demands significantly different methods than general airborne sampling of cleanrooms. Examples of some common clean zones in today’s manufacturing and test environments are: load lock for semiconductor tools; sterility testing isolators for pharmaceutical investigations; cassettes for 200 mm and 300 mm wafers in semiconductors; cassettes for FPD; gloveboxes for nuclear medicine work; small isolators for handling cytotoxic drugs; and evacuated chambers for deposition. Case studies will be provided for a range of these challenging process environments in several industries.

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