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Integrated Resonant Microstructures for Sensor and Timing Applications

A.A. Seshia
University of Cambridge, UK

Keywords:
smart sensors, resonant sensing, oscillators

Abstract:
Microelectromechanical resonant structures have found successful application in resonant gyroscopes, accelerometers, micromirrors and timing references. The common microsystem at the center of these various applications is the microelectromechanical resonator oscillator. This talk will describe the issues relating to system level modeling in micro-electromechanical resonator oscillators. Design evolution in oscillator circuits with a view to performance enhancements in the degree of precise control on the displacement of resonating microstructure will be described.

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