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Fabrication of Suspended C-NEMS Structures by EB Writer and Pyrolysis Method

K. Malladi, C. Wang and M. Madou
University Of California, Irvine, US

Keywords:
C-MEMS, NEMS, suspended structure, pyrolysis, photoresist

Abstract:
Recently suspended C-MEMS structures were fabricated by accurately controlling the processing parameter. However how to fabricate various suspended C-NEMS structures is still a big challenge. Here we successfully fabricated C-NEMS by UV/EB lithography and pyrolysis method. In this work, first we use SU-8 negative photoresist and UV lithography to make microscale SU-8 post pattern. Before developing, by using EB writer, nanoscale patterns were written at the SU-8 subsurface connected to microscale post. After developing the photoresist, we put the sample in furnace and pyrolyzed it at 900 oC to convert the SU-8 structure to carbon MEMS/NEMS. In this work, we tried to solve charging problem by forming a thin metal layer before EB writing using various methods, such as EB evaporation, sputtering system and thermal evaporation. By partly depositing a thin layer of a metal to prevent the repelling of negative charged electrons, we have successful formed various suspended carbon structures, such as bridges and networks. Figure 1 (a) and 1(b) shows two typical SEM pictures of suspended C-MEMS/NEMS. Possible application will be discussed in this presentation.

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