Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2005 NSTI Nanotechnology Conference & Trade Show
Nanotech 2005
Bio Nano 2005
Business & Investment
Nano Impact Workshop
Program
Sessions
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Index of Keywords
Keynote Presentations
Confirmed Speakers
Participating Companies
Industry Focus Sessions
Nanotech Expo
Special Symposia
Conferences
Sponsors
Exhibitors
Venue 2005
Organization
Press Room
Subscribe
Site Map
 
Nanotech 2005 At A Glance
Nanotech Proceedings
Nanotechnology Proceedings
Global Partner
nano tech
Supporting Organizations
Nanotech 2005 Supporting Organization
Media Sponsors
Nanotech 2005 Medias Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

The Structure and Properties of ta-C Film with Dispersion of Incident Beam Energy

S.-H. Lee, T.-Y. Kim, S.-C. Lee, Y.-C. Chung, D.W. Brenner and K.-R. Lee
Korea Institute of Science and Technology, KR

Keywords:
ta-C films, molecular dynamics simulation, Brenner potential

Abstract:
We investigated the structural properties of ta-C film as a function of the dispersion in the incident kinetic energy. The ta-C films were produced on a diamond (100) surface by the bombardment of 3, 000 carbon neutrals with kinetic energy 75 eV. Incident beam energy is dispersed with the standard deviation (¥ò) of Gaussian distribution from 0 to 10. The structural properties such as density and sp3 bond fraction did not show any significant change as the standard deviation varied. However, the residual stress decreased with dispersion of incident beam energy and exhibited a minimum when the standard deviation (¥ò) was 3. In order to reveal the reason for the stress reduction, the radial distribution function (RDF) of these films were investigated. The intensity of the satellite peak at 2.1 Å near the second nearest neighbors showed the same tendency with stress behavior of ta-C film. The present simulation result shows that the residual stress can be reduced by controlling the number of atoms in the meta-stable state which is provided by the energy dispersion of the incident carbon atom.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2005 Conference Program Abstract

 
Gold Sponsors
Nanotech Gold Sponsors
Silver Sponsors
Nanotech Silver Sponsors
Gold Key Sponsors
Nanotech Gold Key Sponsors
Nanotech Ventures Sponsors
Nanotech Ventures Sponsors
Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact