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Fabrication of Nanochannels with Microfluidic Interface using PDMS Casting on Si/Ti Nanomold

M.J. Rust, S. Subramaniam and C.H. Ahn
University of Cincinnati, US

Keywords:
nanochannels, PDMS, nanofluidics

Abstract:
In this abstract, the fabrication of nanochannels using poly (dimethylsiloxane) (PDMS) casting on Si/Ti mold is proposed and results are presented. This work can possibly enable the mass-production of low cost nanochannels to study basic nanofluidic transport phenomena, as well as for applications in nano total analysis systems (nTAS) and drug delivery. Fluidic channels with features on the nanoscale have garnered interest in the areas of biosensors and drug delivery due to their attractive properties. Recently there has been work to fabricate nanochannels by casting in PDMS, thus increasing throughput and lowering costs. In this work, we developed a new method for fabricating nanochannels by combining e-beam lithography, Ti metal deposition, and casting in PDMS. Specifically, Ti was selected as the mold material due to its excellent adhesion to Si and low cost compared with other metals. The combination of e-beam lithography and PDMS casting allows the patterning of high-resolution nanostructures while also maintaining high throughput in fabrication. This will allow the rapid fabrication of nanochannels for basic nanofluidic transport studies, integration with current microfluidic devices, and applications in drug delivery.

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