Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2005 NSTI Nanotechnology Conference & Trade Show
Nanotech 2005
Bio Nano 2005
Business & Investment
Nano Impact Workshop
Program
Sessions
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Index of Keywords
Keynote Presentations
Confirmed Speakers
Participating Companies
Industry Focus Sessions
Nanotech Expo
Special Symposia
Conferences
Sponsors
Exhibitors
Venue 2005
Organization
Press Room
Subscribe
Site Map
Nanotech 2005 At A Glance
Nanotech Proceedings
Nanotechnology Proceedings
Global Partner
nano tech
Supporting Organizations
Nanotech 2005 Supporting Organization
Media Sponsors
Nanotech 2005 Medias Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

Nanostructured Gas Microsensor Platform

D. Routkevitch, O. Polyakov, D. Deininger and C. Kostelecky
Synkera Technologies, Inc., US

Keywords:
solid state gas sensor, microsensor, ceramic MEMS

Abstract:
Nanostructured materials, with their small grain size, large number of grain boundaries, and high specific surface area, hold promise for significantly improving the performance of solid-state gas sensors. To fully realize this potential, precision nanoscale engineering of the morphology and composition of sensing materials is needed. Furthermore, multiple challenges are associated with integration of nanostructured materials into reliable and manufacturable microsensors. This talk will provide an overview of our efforts to address these challenges through development of a novel gas microsensor platform based on self-organized nanoporous ceramic. Featured sensors incorporate a thermally isolated high surface area nanostructured sensing element interfaced with both microheater and sensing electrodes. In this talk we will discuss the effects of sensor design, specific surface area, deposition processes and other factors on sensor fabrication and performance. The microsensor architecture described in this presentation has numerous advantages over conventional sensors. Several types of gas microsensor products are under development at Synkera Technologies using this platform. This presentation will highlight our recent results related to sensing of low level (0.1-100 ppm) water vapor for high altitude low temperature balloon-born meteorological measurements, process control and other demanding applications. Several other case studies will be briefly overviewed.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2005 Conference Program Abstract

 
Gold Sponsors
Nanotech Gold Sponsors
Silver Sponsors
Nanotech Silver Sponsors
Gold Key Sponsors
Nanotech Gold Key Sponsors
Nanotech Ventures Sponsors
Nanotech Ventures Sponsors
Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact