Effects of the Process Parameters on the Carbon Nanotubes Growth by Thermal CVD
C. Verissimo, S.A. Moshkalyov, A.C.S. Ramos, J.L. Gonçalves, O.L. Alves and J.W. Swart
CCS - UNICAMP, BR
carbon nanotubes, CVD, Ni nanoparticles, thin films
Carbon nanotubes growth was performed by thermal chemical vapor deposition using a tubular furnace and methane as carbon feedstock gas. Thin films of nickel were employed as catalysts supported onto a SiO2/Si substrate. The influence of H2:CH4 gas ratio, temperature, gas mixture composition, among others experimental parameters, on the CNTs growth was investigated. SEM images and Raman spectra showed the formation of multiwall carbon nanotubes and the effect of experimental conditions on the CNT growth. An interesting result observed was that nickel particles larger than 100 nm have a tendency to form CNTs with metal on both ends suggesting a complex growth mechanism indicating that initial size of metal particles could influence not only the diameter but also the growth mechanism of CNTs.
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Nanotech 2005 Conference Program Abstract