A Novel Method of Fabricating Optical Gratings Using the One Step DRIE Process on SOI Wafers
A.W. Cooper, P.T. Docker and M.C. Ward
The University of Birmingham, UK
DRIE, gratings, SOI, dry release
This paper describes a novel technique for manufacturing optical gratings by using the one step DRIE (Deep Reactive Ion Etching) process. Using the notching effect documented in previous work when working with silicon on insulator (SOI) wafers, fully released intact gratings have now been produced.
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Nanotech 2005 Conference Program Abstract