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Micromachined Nanocrystalline Silver Doped Tin Oxide Hydrogen Sulfide Sensor

J. Gong, Q. Chen, M-R Lian and N-C Liu
University of Central Florida, US

Keywords:
nanocrystalline SnO2, micromachine, H2S sensor

Abstract:
We report here an ultra high sensitive micromachined hydrogen sulfide gas sensor with nanocrystalline thin (100nm) silver doped SnO2 film. A polymeric sol-gel process has been successfully developed in fabricating the thin SnO2 nanofilm as the gas sensing material. By doping with silver catalyst during the sol gel process, low working temperature of 70C and ultra high sensitivity to H2S has been achieved. The sensor performs better at extreme (both dry and wet) humidity conditions than published results and tested commercialized H2S sensors. Furthermore, this sensor is less sensitive to common interference gases like Cl2, HCl, SO2, C6H14, CH4, CO, C3H8 etc. thus few false alarm will be encountered.

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