Integrated Optical Profiler and AFM: a 3D Metrology System for Nanotechnology
M. Jobin, A. Du and R. Foschia
University of Applied Sciences, CH
Keywords:
atomic force microscopy, interferance microscopy, nanoscale metrology
Abstract:
A versatile 3D metrology tool for nanotechnology purpose has been built. It consist of an home-made white-light interferance microscope operating in the vertical scanning mode, integrated into a commercial Atomic Force Microscope. The performance in terms of acuracy, speed and noise level of the instruments will be presented as well as one illustrative application in MEMS industry.
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Nanotech 2005 Conference Program Abstract
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