RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors
A. Salomonsson, S. Roy, C. Aulin, L. Ojamäe, P.-O. Käll, M. Strand, M. Sanati, A. Lloyd Spetz
RuO2, Ru, SiC-FET, C(V) catalytically active nanoparticles
Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).
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Nanotech 2005 Conference Program Abstract