 | RuO2 and Ru Nanoparticles for MISiC-FET Gas Sensors
A. Salomonsson, S. Roy, C. Aulin, L. Ojamäe, P.-O. Käll, M. Strand, M. Sanati, A. Lloyd Spetz
IFM, SE
Keywords:
RuO2, Ru, SiC-FET, C(V) catalytically active nanoparticles
Abstract:
Catalytically active nanoparticles used as gate material on SiC-FET gas sensors. The goal is to improve the selsectivity and senstitivty.The sensors are sensitive towards oxidising and reducing gases (H2, NH3, C3H6).
Back to Program
Nanotech 2005 Conference Program Abstract
|
