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A Method for Solving Arbitrary MEMS Perforation Problems with Edge and Rare Gas Effects

T. Veijola and P. Raback
Helsinki University of Technology, FI

Keywords:
MEMS modeling, Perforation, Reynolds equation

Abstract:
We present an accurate and fast method solving arbitrary perforation problems utilizing a solver for an extended modified Reynolds equation, the Local Impedance Reynolds (LIR) solver. The extension includes an additional term in the Reynolds equation that models the local flow impedance due to perforation. The modification is needed for rare gas effects. The solution method consists of three phases: 1) specification of the specific impedance profile of the perforation, 2) modification of the dimensions of the structure, and 3) solution of the extended Reynolds equation using that impedance profile. The method is verified agaist a full 3D simulation.

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