Stress Optimization of a Micromechanical Torsional Spring
T. Klose, D. Kunze, T. Sandner, H. Schenk, H. Lakner, A. Schneider and P. Schneider
Fraunhofer IPMS, DE
MEMS, ANSYS, MOSCITO, optimization, torsional spring
In this paper we present a method for the design of a stress-optimized, micromechanical torsional spring, used in MEMS. Our optimization approach is based on a software tool for simulator-based optimization MOSCITO, cooperating with the FEM tool ANSYS. For a specific spring geometry we are able to increase maximally possible deflection by approximately 30 percent.
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Nanotech 2005 Conference Program Abstract