Hot Embossing for realizing Bio-MEMS and MOEMS applications
J. Fröhling
Jenoptik Mikrotechnik GmbH, DE
Keywords:
Polymer MEMS
Abstract:
Hot Embossing is a technology for realizing micro and nanostructures in polymers. Mainly used for Microfluidic applications like µ-TAS, PCR Chips, DNA-Chips, etc. HE based on a equipment which provides foces to create pressure on the polymer and temperature to be able to heat the polymer up above the glass transition temperature. Furthermore, the demands on the tool/mould is very significant. Because every structure on the tool is going to be mapped on the substrate. Therefore it is more than appropriate to create nanostructures.
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Nanotech 2005 Conference Program Abstract
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