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Nano Science and Technology Institute 2005 NSTI Nanotechnology Conference & Trade Show
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Automated and Integrated Mask Genertion from a CAD Constructed 3D Model

R.L. Schiek and R.C. Schmidt
Sandia National Laboratories, US

Keywords:
surface micromachining CAD tool, CAD tools

Abstract:
We have developed and implemented a method which when given a three-dimensional object can infer from the object's topology the two-dimensional masks needed to produce that object with surface micromachining. The masks produced by this design tool can be generic, process independent masks, or if given process constraints, specific for a target process. This allows for 3D designs to be carried across multiple production processes and allows the designer to create their model within the design environment of their choice. This method has been validated against a set of real, multi-layer MEMS devices with complexities of over 80, 000 vertices and 5 structural layers.

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