XPS Studies of Silicon Nanoclusters/Nanocrystals Embedded in SiO2 Matrix
T.P. Chen and Y. Liu
Nanyang Technological University, SG
Keywords:
nanocrystal, XPS, annealing effect
Abstract:
In this work, X-ray photoelectron spectroscopy (XPS) is used to study the annealing effects on the chemical structures, depth profiling of the chemical states and core-level shifts of the Si nanocrystals in the Si-implanted SiO2 films.
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Nanotech 2005 Conference Program Abstract
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