Nano Science and Technology InstituteNano Science and Technology Institute
Nano Science and Technology Institute 2005 NSTI Nanotechnology Conference & Trade Show
Nanotech 2005
Bio Nano 2005
Business & Investment
Nano Impact Workshop
Program
Sessions
Sunday
Monday
Tuesday
Wednesday
Thursday
Index of Authors
Index of Keywords
Keynote Presentations
Confirmed Speakers
Participating Companies
Industry Focus Sessions
Nanotech Expo
Special Symposia
Conferences
Sponsors
Exhibitors
Venue 2005
Organization
Press Room
Subscribe
Site Map
 
Nanotech 2005 At A Glance
Nanotech Proceedings
Nanotechnology Proceedings
Global Partner
nano tech
Supporting Organizations
Nanotech 2005 Supporting Organization
Media Sponsors
Nanotech 2005 Medias Sponsors
Event Contact
696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
Ph: (925) 353-5004
Fx: (925) 886-8461
E-mail:
 
 

IrO2 Nano Structures by Metal Organic Chemical Vapor Deposition

F. Zhang, R. Barrowcliff, G. Stecker, D. Wang and S-T Hsu
Sharp Labs of America, Inc., US

Keywords:
IrO2, nano rods, nano tubes, nano wires, MOCVD, wingle crystal, IV

Abstract:
This paper will discuss the deposition of IrO2 nano structures using (methycycpentadienyl) (1, 5-cyclooctadiene) iridium as the precursor and using Metal Organic Chemical Vapor Deposition (MOCVD) method with no template. Three different shapes of IrO2 nano structures have been successfully synthesized: they are IrO2 nano rods, IrO2 nano tubes and high aspect ratio IrO2 nano wires. SEM pictures show that the nanorods are densely aligned vertically. The hollowed nano tubes were actually formed by four nano rods grown in clusters. High aspect ratio of IrO2 nano wires with naturally formed sharp tips are about 10-50nm in diameter and 1-2 um long. We also realized selective growth of IrO2 nano wires by optimizing the catalyst layer. Low and high resolution TEM revealed that the IrO2 nano rods and nano tubes are polycrystalline structure with dislocations and defects. But the IrO2 nano wires are perfect single crystals structure with [001] orientation and sharp tips about 5nm. Electrical measurements show the IrO2 nano wires are metallic conductive with resistivity at the range of 300 - 400 uohm-cm. The temperature dependence of resistivity of the IrO2 nanowire was around 3 x10-3 K-1. Detailed processing conditions to form these different structures will be presented.

Back to Program

Sessions Sunday Monday Tuesday Wednesday Thursday Authors

Nanotech 2005 Conference Program Abstract

 
Gold Sponsors
Nanotech Gold Sponsors
Silver Sponsors
Nanotech Silver Sponsors
Gold Key Sponsors
Nanotech Gold Key Sponsors
Nanotech Ventures Sponsors
Nanotech Ventures Sponsors
Sponsors
Nanotech Sponsors
News Headlines
NSTI Online Community
 
 

© Nano Science and Technology Institute, all rights reserved.
Terms of use | Privacy policy | Contact