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Au Nano-Wire Transferring onto HSQ by Nano Imprinting Technology

J.F. Liu, Y.J. Hsu, J.H. Chen, F.S. Huang and S.Z. Chen
National Tsing Hua University, TW

Keywords:
nano wire, transfer, imprinting, HSQ, nano imprint lithography

Abstract:
In this paper, we present the technique of transferring Au nano-wire on HSQ by using nano imprint. The Au nano-wires were fabricated by electroless-plating and investigated by TEM analysis. The stable nano imprinting and suitable diluted/prebake process of HSQ were also investigated to have effective transferring condition. The Au nano-wires transferring results were also investigated by using SEM photography and optical microscope.The Au mold, nano-wires with the width is about~ 150-200 nm.The low pressure and low temperature imprinting process with the optimum condition of dilute HSQ to succeed transfer Au nano-wire from mold to HSQ. This technology is suitable for the future flexible electronics application.

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