Au Nano-Wire Transferring onto HSQ by Nano Imprinting Technology
J.F. Liu, Y.J. Hsu, J.H. Chen, F.S. Huang and S.Z. Chen
National Tsing Hua University, TW
nano wire, transfer, imprinting, HSQ, nano imprint lithography
In this paper, we present the technique of transferring Au nano-wire on HSQ by using nano imprint. The Au nano-wires were fabricated by electroless-plating and investigated by TEM analysis. The stable nano imprinting and suitable diluted/prebake process of HSQ were also investigated to have effective transferring condition. The Au nano-wires transferring results were also investigated by using SEM photography and optical microscope.The Au mold, nano-wires with the width is about~ 150-200 nm.The low pressure and low temperature imprinting process with the optimum condition of dilute HSQ to succeed transfer Au nano-wire from mold to HSQ. This technology is suitable for the future flexible electronics application.
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Nanotech 2005 Conference Program Abstract