A Nano-Transistor with a Cavity
C. Ravariu, A. Rusu, M. Profirescu and F. Ravariu
Politehnica University of Bucharest, RO
SOI, MOS, SET, tunnel current, simulations, nanodevice
A SOI nanotransistor with a cavity was simulated. The global current is a superposition of a tunnel current through the cavity and an inversion current at the film bottom. The tunnel source-drain current prevails in sub 1-nm film thickness and provides the ID-VDS characteristics with a minimum. For film thickness comprised between 100-10nm, the ID-VGS curves preserve similar shapes with a MOS/SOI transfer characteristics. For sub1-nm film thickness, the shape of the ID-VGS characteristics with a maximum suggests a SET like conduction. From the electron concentration simulations result a transport of the electrons one-by-one in the transistor body, which proves the SET like behaviour.
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Nanotech 2005 Conference Program Abstract