Durable Anti-Stiction Coatings by Molecular Vapor Deposition (MVD)
B. Kobrin, J. Chinn and R.W. Ashurst
Applied Microstructures, Inc., US
stiction, self-assembled monolayer, SAM, hydrophobic, hydrophilic, durable, coating, film, surface modification
Development of new SAM coatings using a “sequential” vapor technique which can be deposited on almost any substrate material and withstand harsh environments is reported. Technical benefits for the improved surface modification method called Molecular Vapor Deposition (MVD) are discussed.
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Nanotech 2005 Conference Program Abstract