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MEMS Reliability Assessment ProgramMicro-electromechanical Systems (MEMS) Reliability Assessment Program for Department of Defense Activities

J.L. Zunino III, D. Skelton and R. Mason
U.S. Army Corrosion Office, US

Keywords:
MEMS, reliability, modeling, testings, military, DOD, sensors

Abstract:
As the U.S. Army transforms into a lighter, more lethal force, the technologies that support both legacy and emerging weapon systems must decrease in size while increasing in intelligence. Micro-electromechanical systems (MEMS) are one such technology that the Department of Defense (DOD) and the Army will rely on heavily in the future. Current and future military applications of MEMS devices include safety and arming devices, fuzing devices, various guidance systems, sensors/detectors, inertial measurement units, tracking devices, radio frequency devices, wireless radio frequency identification (RFID) and network systems, global positioning systems (GPSs), radar systems, mobile base systems, satellites, and missiles. The goals of the MEMS Reliability Assessment Program are to 1) Establish the reliability of MEMS devices including the impact of transportation, long term storage, operating environment, packaging, and interconnection issues; 2) Analyze the compatibility of MEMS devices with energetic and other hazardous materials found in military items; 3) Identify failure mechanisms and failure rates; 4) Develop accelerated test protocols for assessing the reliability of MEMS; 5) Develop reliability models for these devices; 6) Identify a standardizing body for MEMS reliability standards, and establish standard terminology, definitions, and categories for MEMS devices; 7) Determine potential test methodologies for assessing these mechanisms.

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