MEMS Pressure Sensor with Two Thin Film Piezoelectric Read-Out

Keywords:
piezoelectric pressure sensor, MEMS, sensitivity, lead zirconate titanate (PZT) thin film

Abstract:
MEMS accelerometers using piezoelectric lead zirconate titanate (PZT) thin films as read-out have been attracting a great deal of attention due to their simple structures and high sensitivity. This paper proposes a model of micro pressure sensor with two suspended flexural PZT-on-silicon beams. The geometry and elastic properties of the thin films have been taken into account whtn formulating the acceleration equations. To verify which vibration mode is the dominant one on the press, mode analysis has been carried out by using MEMS software: CoventorWare. The analytical equation between charge and press has been derived, which provides an opportunity to design the sensor. The research shows that the proposed pressure sensor is simple to manufacture, and reliable for large g conditions and wide frequency response.

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Nanotech 2005 Conference Program Abstract