Active Damping Control in MEMS Using Parametric Pumping
B.J. Gallacher, J.S. Burdess, A.J. Harris and K.M. Harish
Newcastle University, UK
parametric, gyroscope, feedthrough, Hills
This paper investigates the degree of damping control provided by parametrically pumping a harmonically forced microresonator. It is shown that the parametric excitation terms result in reduced damping levels and thus increases the Q-factor of the mode of vibration to which it is applied. The increased Q-factor of the parametrically enhanced resonator permits reduced forcing levels and thus may provide a suitable method for minimising electrical feedthrough and improving sensor performance.
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Nanotech 2005 Conference Program Abstract