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Application of MCLC Method for Estimating the Parameters of MEMS Sensors

E. Colinet, J. Juillard and L. Nicu
SUPELEC, FR

Keywords:
parameter extraction, identification, limit cycles, nonlinear systems

Abstract:
An original method for estimating the parameters of MEMS sensors is presented. It is based on the measurement of binary oscillations appearing at the system's output when a discrete-time relay feedback is used: the parameters of the system can then be deduced from the shape of these oscillations with a very good accuracy. This method is presented and demonstrated in the case of the identification of some cantilever micro-beams.

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