IDEA, a CAD Tool for the Design of Deformable Micro-Structures: Extension to the 2D Deformation of Arbitrarily-Shaped Membranes
J. Juillard and E. Colinet
control, inverse problems, BEM, coupled-field physics
A method for solving design problems involving coupled-field physics is presented: it is demonstrated in the case of the electrostatic actuation of a deformable micro-mirror. The focus of the present paper is on the inversion of the mechanical problem in the case of a membrane of arbitrary shape, that is, how to compute the ideal pressure distribution on the membrane which corresponds to a given set of displacements.
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Nanotech 2005 Conference Program Abstract