CNTs-Insulator- Semiconductor System for Chemical and Biological Sensor Applications
J-H Cheon, Q. Lin, B-D Kong, D.W. Kang, L. Kim, J.S. Suh, Y.J. Park and H.S. Min
Seoul National University, KR
carbon nanotubes, biological sensor
In this paper, an Electrolyte-CNTs-Insulator-Semiconductor capacitor has been prepared due to compatibility with CMOS technology. To prepare this capacitor, we used the bonding technique to combine the MWNT array.It shows that the surface potential modulation occurs in the semiconductor region at a certain potential so electrolyte can act as a well functional liquid gate.
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Nanotech 2005 Conference Program Abstract