Advanced Particle Beam Technologies for Nano-Characterization and Fabrication
J.J.L. Mulders and J. Greiser
FEI Company, NL
electron microscopy, focused ion beam, nanoprototyping, tomography
As the structures under investigation grow ever smaller, the need for high resolution, nanoscale imaging and protoyping is a constant factor. The presented range of DualBeam and single column focused ion and electron beam microscopes enables manufacturers and R&D people to keep pace with technology shifts and develop next generation technologies and products. For example, one key application enabled by the use of these tools is the manufacture of carbon nanotubes. The ability to develop, manipulate and clean the tubes with the use of an ion beam from could help to enable very small transistors.
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Nanotech 2005 Conference Program Abstract