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Design, Modelling and Optimisation of Integrated Piezoelectric Micro Power Generators

M. Marzencki, S. Basrour and B. Charlot
TIMA, FR

Keywords:
micro power generators, piezoelectric conversion

Abstract:
This paper presents a mechanical vibration energy scavenging solution for micro power generation. The transduction is performed using a novel resonant cantilever beam SOI structure with a piezoelectric film. Simulation and optimization of such a device fabricated using a specific MEMS process and with piezoelectric thin film is detailed. The simulation results will be compared with experimental data obtained using devices currently under fabrication.

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