Optimization of Nano-Machining with Focused IonBeams
L.A. Giannuzzi, P. Anzalone and D. Phifer
FEI Company, US
Keywords:
FIB, nano-machining
Abstract:
It is shown that by optimizing ion-solidinteractions, nano-lines of different aspect ratios can be machined into samples using focused ionbeams.
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Nanotech 2005 Conference Program Abstract
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