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Multi-Degree of Freedom Micromachined Decoupled Gyroscope for Automotive Applications

C. Acar, C.C. Painter, A.R. Schofield and A.M. Shkel
UCI Microsystems Laboratory, US

Keywords:
gyroscope, decoupled, automotive, AGC, optimization

Abstract:
Towards a robust sensor design for automotive systems, we introduce a novel multi-degree of freedom gyroscope system. The design offers a number of unique advantages over conventional gyroscope designs. Firstly, quadrature error is reduced due to the elimination of coupling between the stiffness members used to drive the device and stiffness members used to sense the device, which is impossible in a single degree of freedom system and has never been implemented before in multi-degree of freedom systems. Secondly, the two degree of freedom sense system allows the device to operate in a frequency region that is robust to thermal and pressure fluctuations, where amplitude remains largely unchanged compared to the amplitude variations at the eigenfrequencies. In this paper, we present fundamentals of the device design, detailed parametric modeling, experimental verification design of a fabricated device, and preliminary electronics design for drive, sensing, and control.

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