Carl Zeiss SMT
The Nano Technology Systems Division of Carl Zeiss SMT offers cutting edge technology electron microscopes and focused ion beam system for failure analysis and device development. The unique LIBRA® energy filtering TEMs with the OMEGA In-column filter enable atomic scale imaging and analysis in one single tool with genuine ease of operation.
The Semiconductor Metrology Systems Division of Carl Zeiss SMT offers leading edge AIMS™ mask inspection systems and MeRiT™ E-beam based mask repair systems for the complete mask defect review and repair cycle.
Nanotech 2005 Exhibitor Description