Carl Zeiss SMT

Booth: 804

The Nano Technology Systems Division of Carl Zeiss SMT offers cutting edge technology electron microscopes and focused ion beam system for failure analysis and device development. The unique LIBRA® energy filtering TEMs with the OMEGA In-column filter enable atomic scale imaging and analysis in one single tool with genuine ease of operation.

The Semiconductor Metrology Systems Division of Carl Zeiss SMT offers leading edge AIMS™ mask inspection systems and MeRiT™ E-beam based mask repair systems for the complete mask defect review and repair cycle.

Web site:

http://www.smt.zeiss.com

Nanotech 2005 Exhibitor Description