Alcatel Micro Machining Systems

Booth: 411

Alcatel Vacuum Technology manufactures a comprehensive line of adixen brand vacuum pumps and leak detectors including Rotary Vane vacuum pumps, Dry vacuum pumps, Roots Blower systems, Turbomolecular pumps, Hybrid Turbomolecular pumps, vacuum flanges and fittings, vacuum valves, vacuum gauges, dry and wet Helium Leak Detectors. In the field of advanced process technology, Alcatel manufactures adixen brand DRIE Plasma Etch systems for deep silicon etch processes used in the fabrication of MEMS and MOEMS devices.

Web site:

http://www.adixen.com

Nanotech 2005 Exhibitor Description