SoftMEMS is the creator of the popular, powerful, easy-to-use CAD tool suites MEMS Pro, MEMS Master and MEMS Xplorer for the design and analysis of MEMS. Software functionalities encompass mixed MEMS/IC schematic capture, simulation, design optimization, statistical analysis, and full custom mask layout supporting popular mask formats. Also included are manufacturing and design rule verification, 3D model generation and visualization from manufacturing process descriptions, behavioral model creation and links to 3D analysis packages. A variety of foundry-specific modules are fully integrated with SoftMEMS’ tool suites to ensure process compatibility and manufacturability with the world’s leading MEMS foundries. We will be showing our new MEMS Pro 5.1 release.