Tethis’ proprietary technology is a technique for the deposition of nanostructured films by the assembling of nanoparticles. These are produced using a patented Pulsed Microplasma Cluster Source (PMCS).
PMCS operates with metals (including refractory ones), and generally with all conductive materials (as graphite). Reactive gases can be added to the process occurring into PMCS to modify nanoparticle stoichiometry. For example, oxygen can be used to produce oxide nanoparticles.
Respect to standard deposition techniques, such as evaporation or sputtering, where film precursors are single atoms or molecules, PMCS film precursors are nanoparticles moving at low kinetic energy. The films produced by PMCS are then much more porous, and exhibit a very high surface active area. Furthermore PMCS technique operates at ambient temperature.
Its high flexibility has been exploited to create gas sensors, supercapacitors, fuel cells and biocompatible nanostructured substrates.
Nanotech 2005 Exhibitor Description