Interferomet is a new company that has developed a family of high precision interferometers, based on an innovative common-path optical configuration, for the accurate dimensional measurement of the position and movement of surfaces at the sub-nanometric level.
Applications include measurement of surface motion, vibration, surface profiling. Using a dual system in a confocal arrangement examining MEMS devices, film thickness and flexure can be measured simultaneously.
Typical accuracies are:
- Resolution: + 1 nm over 25 mm or 1,000 mm, DC coupled
- Resolution: + 1pm over 10 nm, AC coupled
All instrument configurations incorporate the Interferomet AIMS™ Interferometer (Adaptive Interferometric Metrology System).