Tegal Corporation

Booth: 100

Tegal Corporation, headquartered in Petaluma, California, is a leading designer and producer of plasma etch, physical vapor deposition (PVD), and nano layer deposition (NLD)* manufacturing systems used in the development and commercial production of devices based on nanotechnology and microfabrication technology. Tegal's suite of processing applications is used extensively for data storage, MEMS, microfluidics, smart cards, opto-telecom devices, integrated circuits (ICs), Radio Frequency Identification Devices (RFID's) and other related products. Both etching and deposition are key process steps and must be repeated multiple times in the production of these devices. Tegal markets and services its systems in all major IC-producing regions of the world.

Web site:

http://www.tegal.com