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Nano Science and Technology Institute 2004 NSTI Nanotechnology Conference & Trade Show
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696 San Ramon Valley Blvd., Ste. 423
Danville, CA 94526
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Tegal Corporation

Booth: 100

Tegal Corporation, headquartered in Petaluma, California, is a leadingdesigner and producer of plasma etch, physical vapor deposition (PVD), andnano layer deposition (NLD)* manufacturing systems used in the developmentand commercial production of devices based on nanotechnology andmicrofabrication technology. Tegal’s suite of processing applications isused extensively for data storage, MEMS, microfluidics, smart cards,opto-telecom devices, integrated circuits (ICs), Radio FrequencyIdentification Devices (RFID’s) and other related products. Both etchingand deposition are key process steps and must be repeated multiple times inthe production of these devices. Tegal markets and services its systems inall major IC-producing regions of the world.

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http://www.tegal.com

 
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