Surface Technology Systems PLC

Booth: 1401

Manufacturer of cassette-to-cassette cluster and single/batch loadlocked plasma etch and deposition systems that can be configured with ICP, RIE, XeF2 and CVD sources. Products include the market-leading ASE® deep silicon etch process for MEMS micromachining, which is also being utilized by a growing number of international researchers and device manufacturers to etch silicon nanostructures with controlled profile and low CD loss at high aspect ratios. STS also supplies a range of dielectric etch and deposition processes for optical waveguides, and GaAs, InP and GaN etch processes for LED, VCSELs, LASER and wireless applications. All STS' process technologies are available on a range of platforms which give a logical upgrade path from R&D and pilot production to volume production, without the need for process re-qualification. Lifetime process support, from a dedicated Process Engineering Team based in the UK headquarters, is available to all customers, and comprehensive service and spares support is offered through a worldwide network of STS Service Centres and qualified agents.

Web site:

http://www.stsystems.com