Nano-Master, Inc.

Booth: 1202

NANO-MASTER, Inc. specializes in designing and manufacturing products primarily for MEMS, Nanotechnology, and Semiconductor applications in small scale manufacturing or R&D. It covers a wide range of products like Sputter Coaters, PECVD Systems, RIE and Deep RIE Systems; Megasonic Single Wafer and Mask Cleaners.

The Sputter Coater NSC 4000 is a PC controlled stand-alone RF/DC and reactive sputtering system with a water cooled and heated rotating 8" substrate platen. It can have up to six 2" or 3" planar magnetrons, and can be configured as down-sputtering, side-sputtering, or up-sputtering system.

Nano-Master NPE-4000 PECVD system is capable of depositing high quality SiO2, Si3N4, or DLC films and Nanotubes on up to 8” diameter substrate sizes. To generate plasma, it uses RF shower-head electrode or Hollow Cathode RF plasma source with Fractal Gas Distribution. Platen can be heated to 700°C.

The NRE-4000 is a stand-alone Reactive Ion Etching (RIE) system with shower-head gas distribution and a water cooled RF platen.

The NDR-4000 is Deep Reactive Ion Etching System with cryogenic wafer cooling and biasable platen and a 2KW, 8" Inductively Coupled Plasma Source.

The NRP-4000 is a Dual Reactive Ion Etching and Plasma Enhanced Chemical Vapor Deposition System.

Web site:

http://www.nanomaster.com